Adsorption film, preparation method thereof and polishing head comprising adsorption film

The invention provides an adsorption film, a preparation method of the adsorption film and a polishing head comprising the adsorption film. The adsorption film comprises a film body and a parylene coating arranged on the film body. And the membrane body is made of a silica gel composite material. The preparation method comprises the following steps: (1) cleaning a membrane body of the adsorption membrane to obtain a cleaned membrane body; and (2) depositing a poly-p-xylylene layer on the cleaned membrane body by using chemical vapor deposition to obtain the adsorption membrane. The smooth degree of the surface of the adsorption film is increased, the ceramic ring is easier to assemble, and the compactness of the coating improves the adsorbability of the surface of the silica gel composite material. 本发明提供一种吸附膜及其制备方法和包含其的抛光头，所述吸附膜包括膜本体以及设置在所述膜本体上的聚对二甲苯涂层；所述膜本体的材质为硅胶复合材料。所述制备方法包括如下步骤：(1)吸附膜的膜本体经清洗，得到清洗后膜本体；(2)利用化学气相沉积在所述清洗后膜本体上沉积聚对二甲苯层，得到所述吸附膜。本发明增加了吸附膜表面的光滑程度，更易装配陶瓷环，而且涂层的致密性改善了硅胶复合材料表面的吸附性。