Method for manufacturing single-piece workpiece with resin film, and apparatus for manufacturing single-piece workpiece with resin film

The invention provides a method for manufacturing a single-piece workpiece (21) with a resin film. An energy beam-curable resin film-forming film (13) is laminated on a surface (14 'b) on the opposite side of a circuit surface (14a) of a workpiece having a circuit surface or a workpiece process...

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Hauptverfasser: NEMOTO TAKU, KABUTO AKIO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a method for manufacturing a single-piece workpiece (21) with a resin film. An energy beam-curable resin film-forming film (13) is laminated on a surface (14 'b) on the opposite side of a circuit surface (14a) of a workpiece having a circuit surface or a workpiece processed object (14') obtained by processing the workpiece. An in-line process is performed from a cutting step (j) for cutting a resin film-forming film (13) to a curing step (k) for irradiating the resin film-forming film (13) with an energy beam to form a resin film (13 '), or from the curing step (k) to the cutting step (j). 本发明提供一种带树脂膜的单片化工件加工物(21)的制造方法,在具有电路面的工件、或者通过对工件进行加工而得到的工件加工物(14')的电路面(14a)的相反侧的面(14'b)上层叠能量束固化性的树脂膜形成膜(13),通过在线处理来执行:从割断树脂膜形成膜(13)的割断工序(j)到对树脂膜形成膜(13)照射能量束而形成树脂膜(13')的固化工序(k);或者从固化工序(k)到割断工序(j)。