High-linearity reflector based on MEMS technology

The invention discloses a high-linearity reflector based on an MEMS technology, and the reflector comprises a pedestal, a symmetric permanent magnet which is disposed on the pedestal and provides a stable magnetic field, a housing which is disposed in cooperation with the pedestal, an annular cap which is integrally connected with the housing and the pedestal through bolts, and a reflector surface which is disposed in cooperation with the housing. Asymmetric electrode stress can be converted into rotation angle output by controlling electrode current, the invention further discloses a closed-loop control process of the reflecting mirror, and meanwhile the reflecting mirror has the advantages of being compact in structure, small in size and easy to assemble. 本发明公开了一种基于MEMS技术的高线性度反射镜，包括底座，安装于底座之上提供稳定磁场的对称永磁体，与底座配合安装的外壳，通过螺栓与外壳，底座一体连接的环形帽，与外壳配合安装的反射镜面，镜面背部布置有电极，通过控制电极电流即可将不对称的电极受力转化为转角输出，本发明还公开了该反射镜的闭环控制过程，同时本发明具有结构紧凑，尺寸小，易于装配的特点。