Wafer sorting system and wafer sorting method

Wafer sorting system and wafer sorting method

The invention provides a wafer sorting system and a wafer sorting method. The system is provided with a conveying device, a grabbing device, a plurality of wafer storage boxes and a control device. The plurality of wafer storage boxes are divided into a good product area, a non-classified inferior p...

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Hauptverfasser: GONG SHENGXIANG, LIAO WEIJIE, TANG FENGCHENG, CHEN ZHENGKAI, LIN XIUWEI, ZHAO XUANXUN, HE GUOCHENG, SONG BAICHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
PERFORMING OPERATIONS
POSTAL SORTING
SEPARATING SOLIDS FROM SOLIDS
SORTING
SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTEDPIECE-MEAL, e.g. BY PICKING
TRANSPORTING
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creator GONG SHENGXIANG
LIAO WEIJIE
TANG FENGCHENG
CHEN ZHENGKAI
LIN XIUWEI
ZHAO XUANXUN
HE GUOCHENG
SONG BAICHEN
description The invention provides a wafer sorting system and a wafer sorting method. The system is provided with a conveying device, a grabbing device, a plurality of wafer storage boxes and a control device. The plurality of wafer storage boxes are divided into a good product area, a non-classified inferior product area and a classified inferior product area. The classified inferior product area is provided with a plurality of defect areas corresponding to a plurality of defect types respectively. And the system conveys the non-defective wafers to the non-defective area, records the defect types of the defective wafers and conveys the defective wafers to the non-classification defective area. The system also performs classification processing on the plurality of inferior wafers in the non-classification inferior product area, takes the inferior wafers, and conveys the inferior wafers to the corresponding defective area in the classified inferior product area based on the classification result. According to the inventio
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subjects PERFORMING OPERATIONS
POSTAL SORTING
SEPARATING SOLIDS FROM SOLIDS
SORTING
SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTEDPIECE-MEAL, e.g. BY PICKING
TRANSPORTING
title Wafer sorting system and wafer sorting method
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