Wafer sorting system and wafer sorting method

The invention provides a wafer sorting system and a wafer sorting method. The system is provided with a conveying device, a grabbing device, a plurality of wafer storage boxes and a control device. The plurality of wafer storage boxes are divided into a good product area, a non-classified inferior p...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GONG SHENGXIANG, LIAO WEIJIE, TANG FENGCHENG, CHEN ZHENGKAI, LIN XIUWEI, ZHAO XUANXUN, HE GUOCHENG, SONG BAICHEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention provides a wafer sorting system and a wafer sorting method. The system is provided with a conveying device, a grabbing device, a plurality of wafer storage boxes and a control device. The plurality of wafer storage boxes are divided into a good product area, a non-classified inferior product area and a classified inferior product area. The classified inferior product area is provided with a plurality of defect areas corresponding to a plurality of defect types respectively. And the system conveys the non-defective wafers to the non-defective area, records the defect types of the defective wafers and conveys the defective wafers to the non-classification defective area. The system also performs classification processing on the plurality of inferior wafers in the non-classification inferior product area, takes the inferior wafers, and conveys the inferior wafers to the corresponding defective area in the classified inferior product area based on the classification result. According to the inventio