Manufacturing method of solar cell and solar cell

The embodiment of the invention relates to the photovoltaic field, and provides a solar cell manufacturing method and a solar cell, and the solar cell manufacturing method comprises the steps: providing a substrate which comprises a front surface and a back surface which are opposite to each other;...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MA RUI, LIU CHUANGANG, ZHANG LEILEI, ZHOU JING, LI RUIFENG, MA GANG, ZHANG NING, QIU YANKAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The embodiment of the invention relates to the photovoltaic field, and provides a solar cell manufacturing method and a solar cell, and the solar cell manufacturing method comprises the steps: providing a substrate which comprises a front surface and a back surface which are opposite to each other; forming a doping source layer, wherein the doping source layer is positioned on the front surface; diffusion processing is carried out, so that the doped ions are diffused into the substrate to form an emitting electrode, and laser processing is carried out to form a selective emitting electrode; oxidation treatment is carried out to convert the doping source layer into an oxide layer, the oxidation treatment comprises n cycle steps, the mth cycle step in the n cycle steps comprises an mth heating step and an mth oxidation step which are carried out in sequence, the mth heating step raises the process temperature of the oxidation treatment to an mth preset temperature, and the mth oxidation step raises the process