Multi-view visual inspection jig for surface flaws of semiconductor silicon wafer
The invention relates to the technical field of silicon wafer detection, in particular to a semiconductor silicon wafer surface flaw multi-view visual inspection jig which comprises an integral external mechanism, and the integral external mechanism further comprises an integral bottom plate. The su...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of silicon wafer detection, in particular to a semiconductor silicon wafer surface flaw multi-view visual inspection jig which comprises an integral external mechanism, and the integral external mechanism further comprises an integral bottom plate. The surface of a machined original part has the mirror surface characteristic, at the moment, the machined original part is irradiated through an external irradiation mechanism, light rays reach a photosensitive area along a set light ray path, and when dust exists on the surface of the machined original part or the polishing effect is poor during polishing, the refraction efficiency is low, and refracted light rays projected in the photosensitive area are reduced. According to the product, the trouble that an operator needs to hold the silicon wafer by hand for inspection is avoided, the chance that the semiconductor silicon wafer is in contact with an external object is reduced, and the phenomenon that a machined origi |
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