Droplet deposition method and apparatus
微滴沉积设备包括具有喷嘴(42)的细长腔室(46),为了沉积,工作中的液体微滴从腔室通过喷嘴喷射,用于通过改变腔室的体积来改变腔室中的液体压力以便实现所述微滴的喷射的装置,以及用于使腔室中的液流增加到补充喷射微滴所需量中的装置(38),流体通过所述喷嘴以便清洗喷嘴。 A droplet deposition apparatus includes an elongate chamber having a nozzle through which in operation droplets of liquid are ejected from the chamber for deposition,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | 微滴沉积设备包括具有喷嘴(42)的细长腔室(46),为了沉积,工作中的液体微滴从腔室通过喷嘴喷射,用于通过改变腔室的体积来改变腔室中的液体压力以便实现所述微滴的喷射的装置,以及用于使腔室中的液流增加到补充喷射微滴所需量中的装置(38),流体通过所述喷嘴以便清洗喷嘴。
A droplet deposition apparatus includes an elongate chamber having a nozzle through which in operation droplets of liquid are ejected from the chamber for deposition, means for varying the pressure of liquid in the chamber by varying the volume thereof to effect ejection of the droplets and means for causing a flow of liquid in the chamber in addition to that necessary to replenish the ejected droplets, the flow passing across the nozzle to clean it. |
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