Digital holographic microscope and associated metrology method

The invention discloses a method for correcting a holographic image, a processing device, a dark field digital holographic microscope, measuring equipment and detection equipment. The method comprises the following steps: obtaining the holographic image; determining at least one attenuation function...

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Bibliographische Detailangaben
Hauptverfasser: VAN DE WIJDEVEN JEROEN JOHAN MAARTEN, TENNER VASCO TOMAS, DEN BOEF ARIE JEFFREY, CRAMER HUGO AUGUSTINUS JOSEPH, COOK WILLIAM, RAUB ALEXANDER, COENE WILLEM, SOKOLOV SERGEY
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a method for correcting a holographic image, a processing device, a dark field digital holographic microscope, measuring equipment and detection equipment. The method comprises the following steps: obtaining the holographic image; determining at least one attenuation function due to motion blur from the holographic image; and correcting the holographic image or a portion of the holographic image using the at least one attenuation function. 公开了一种校正全息图像的方法、一种处理装置、一种暗场数字全息显微镜、一种量测设备和一种检测设备。所述方法包括:获得所述全息图像;根据所述全息图像确定由于运动模糊而引起的至少一个衰减函数;以及使用所述至少一个衰减函数校正所述全息图像或所述全息图像的一部分。