Through trench isolation of die
An apparatus includes a die (100) having a protective overcoat (128) and a substrate (104), the substrate (104) including a first region (108) and a second region (112) spaced apart. The device also includes an isolation dielectric (124) between the protective outer coating (128) and the die (100)....
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| Sprache: | chi ; eng |
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| Zusammenfassung: | An apparatus includes a die (100) having a protective overcoat (128) and a substrate (104), the substrate (104) including a first region (108) and a second region (112) spaced apart. The device also includes an isolation dielectric (124) between the protective outer coating (128) and the die (100). A pre-metal dielectric (PMD) barrier layer (120) is between the isolation dielectric (124) and the substrate (104), the PMD barrier layer (120) having a first region (136) contacting the first region of the substrate (108) and a second region contacting the second region (112) of the substrate, the first region (136) and the second region of the PMD barrier layer (120) being spaced apart. A through trench (132) filled with a polymer dielectric (134) extends between the first region (108) and the second region (112) of the substrate (104) and between the first region (120) and the second region (140) of the PMD (120) to contact the isolation dielectric (124).
一种装置包含具有保护性外涂层(128)和衬底(104)的裸片(100)，所述衬底(104)包括间隔开的第一区域(1 |
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