LED chuck

An LED chuck according to the present invention comprises: a top plate on which an object to be inspected is placed; an LED array circuit board which is disposed so as to face the object to be inspected, and which is provided with a plurality of LEDs for heating the object to be inspected placed on the top plate; a cooling plate disposed on the rear surface side of the LED array circuit board; an LED control circuit board which is disposed on the rear surface side of the cooling plate and controls the plurality of LEDs; and a base plate disposed so as to surround the LED control circuit board. The surface of the cooling plate facing the LED control circuit board and the surface of the base plate facing the LED control circuit board are made of a magnetic material. 本发明的LED卡盘包括：载置被检查体的顶板；LED阵列电路板，其与上述被检查体相对地配置，设置有对载置于上述顶板的被检查体进行加热的多个LED；配置在上述LED阵列电路板的背面侧的冷却板；LED控制电路板，其配置在上述冷却板的背面侧，控制上述多个LED；和以包围上述LED控制电路板的方式配置的底板，上述冷却板的与上述LED控制电路板相对的面和上述底板的与上述LED控制电路板相对的面由磁性体材料构成。