Manipulator positioning device and semiconductor equipment

The invention relates to the technical field of semiconductors, in particular to a manipulator positioning device and semiconductor device.A positioning assembly comprises a first elastic piece and a limiting piece which are both installed on a supporting plate, and the two ends of the first elastic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG SHUWEN, LI ZHENG, YU PENGYANG, LI LIN, DING PENGGANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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