Manipulator positioning device and semiconductor equipment

The invention relates to the technical field of semiconductors, in particular to a manipulator positioning device and semiconductor device.A positioning assembly comprises a first elastic piece and a limiting piece which are both installed on a supporting plate, and the two ends of the first elastic piece are a first connecting end and a second connecting end in the first direction respectively; the first connecting end is connected with the supporting plate, the second connecting plate is connected with the limiting piece, the positioning clamping block is used for being installed at a station, a first clamping groove is formed in the positioning clamping block, and the first clamping groove is used for being clamped with the limiting piece so that the first elastic piece can elastically deform in the first direction. The invention aims to provide a manipulator positioning device and semiconductor equipment aiming at at least one technical problem related in the prior art. 本申请涉及半导体技术领域，具体而言，涉及一种机械手定位装置及半导体设备