Three-axis MEMS acceleration sensor and preparation method thereof

The invention relates to a three-axis MEMS acceleration sensor which comprises a substrate layer and three sensitive structure layers, and the three sensitive structure layers are sequentially stacked on the substrate layer. The three sensitive structure layers comprise an X-axis sensitive structure layer, a Y-axis sensitive structure layer and a Z-axis sensitive structure layer, and the Z-axis sensitive structure layer is located between the X-axis sensitive structure layer and the Y-axis sensitive structure layer. In addition, the invention also relates to a preparation method of the acceleration sensor. The acceleration sensor provided by the invention adopts stacked arrangement, is reasonable in layout, can effectively reduce the size of a device, and facilitates the miniaturization design of the device. 本发明涉及一种三轴MEMS加速度传感器，包括基底层以及三个敏感结构层，三个敏感结构层依次层叠在基底层上；三个敏感结构层包括X轴敏感结构层、Y轴敏感结构层以及Z轴敏感结构层，Z轴敏感结构层位于X轴敏感结构层与Y轴敏感结构层之间。另外还涉及该加速度传感器的制备方法。本发明提供的加速度传感器采用层叠式排布，布局合理，能有效地减小器件尺寸，利于器件的小型化设计。