CrAlCu composite target material and preparation method and application thereof

The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlCu composite target material and a preparation method and application thereof. The CrAlCu composite target material is of a double-layer structure, a CrAlCu alloy target material serves as a...

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG XUEHUA, MENG XIAOTING, ZHANG FENGGE, WEI TIEFENG, SHI ZHENG, ZHANG QIANNAN, YUE WANXIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ALLOYS CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER
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Beschreibung
Zusammenfassung:	The invention relates to the technical field of powder metallurgy materials, and particularly discloses a CrAlCu composite target material and a preparation method and application thereof. The CrAlCu composite target material is of a double-layer structure, a CrAlCu alloy target material serves as a target material upper layer, and an Al back plate serves as a target material bottom layer; the CrAlCu alloy target material is prepared from the following components in atomic percent: 30 to 69 at% of Cr, 30 to 69 at% of Al and 1 to 10 at% of Cu, and the thickness of the CrAlCu alloy target material is greater than that of the Al back plate. The invention further discloses a preparation method and application of the CrAlCu composite target material. The CrAlCu composite target material disclosed by the invention is accurate in component control, uniform in structure, free of segregation and better in heat-conducting property and mechanical property, and the melting problem existing in the conventional CrAlCu targ