Systems and methods for process chamber health monitoring and diagnosis using virtual models

A method includes obtaining, by a processor, a plurality of sensor values associated with a deposition process performed in a processing chamber according to a recipe to deposit a film on a surface of a substrate. The method further includes applying a machine learning model to the plurality of sensor values, the machine learning model trained based on historical sensor data of a subsystem of the processing chamber and task data associated with a recipe for depositing the film. The method further includes generating an output of the machine learning model, wherein the output is indicative of a health condition of the subsystem. 一种方法包括由处理器获得与根据配方在处理腔室中执行以在基板的表面上沉积膜的沉积处理相关联的多个传感器值。所述方法进一步包括将机器学习模型应用于多个传感器值，所述机器学习模型是基于处理腔室的子系统的历史传感器数据以及与用于沉积膜的配方相关联的任务数据进行训练的。所述方法进一步包括产生机器学习模型的输出，其中所述输出指示子系统的健康状况。