Tunable vertical cavity surface emitting laser structure

The invention relates to a tunable vertical cavity surface emitting laser structure which comprises a vertical cavity surface emitting laser unit. A micro-electro-mechanical system device bonded to the vertical cavity surface emitting laser unit; the piezoelectric material structure is arranged between the vertical cavity surface emitting laser unit and the micro electro mechanical system device and can be independently controlled; the control unit is connected with the vertical cavity surface emitting laser unit and the micro-electro-mechanical system device, and the control unit adjusts the displacement and angle between the vertical cavity surface emitting laser unit and the micro-electro-mechanical system device by controlling the voltage applied to the piezoelectric material structure. The tunable vertical cavity surface emitting laser structure is functionally different from the prior art in that coaxial parallel control and bidirectional driving are realized, and is structurally different from the prio