Detection substrate, manufacturing method thereof and flat panel detector

The embodiment of the invention discloses a detection substrate, a manufacturing method thereof and a flat panel detector, the surface of a top electrode of a photoelectric conversion device is provided with at least one microstructure and a recess arranged around the microstructure, so that the roughness of the surface of the top electrode is increased, and when light is incident to the side wall of the microstructure, the surface of the top electrode is not damaged. The microstructures can reflect, refract and scatter light, the optical path of incident light in the photoelectric conversion device is increased, sufficient absorption of the incident light is guaranteed, the light utilization rate is improved, the external quantum efficiency of the photoelectric conversion device is improved, and the sensitivity of the flat panel detector is improved. 本发明实施例公开了一种探测基板、其制作方法及平板探测器，通过将光电转换器件的顶电极设置成表面具有至少一个微结构以及围绕微结构设置的凹陷，这样增加了顶电极表面的粗糙度，当光线入射至该微结构的侧壁时，微结构可对光线进行反射、折射和散射，增加了入射光在光电转换器件内的光程，保证入射光的充分吸收，提高光利用率，从而提高光电转换