Preparation method of MEMS (Micro Electro Mechanical System) micromirror array and micromirror

The invention provides a preparation method of an MEMS micromirror array. The preparation method comprises the following steps: S1, arranging a substrate on the surface of a readout circuit board; s2, depositing a sacrificial layer on the surface of the substrate, and etching a through hole in the surface of the sacrificial layer; s3, depositing a mirror surface connected with the readout circuit board on the surface of the sacrificial layer to obtain an MEMS micromirror; s4, etching the MEMS micromirror to obtain micromirror units which are arranged in an array manner; and S5, removing the sacrificial layer to obtain the MEMS micromirror array. According to the method, array arrangement is achieved through independent connection of the reading circuit board and each micromirror unit, each micromirror unit can independently control deflection of the micromirror unit, the required deflection angle can be met under the action of small electrostatic driving force, the use flexibility and effect of a product are