Detection device suitable for detecting micro-mirror array

The invention discloses a detection device suitable for detecting a micro-mirror array. The detection device comprises an upper computer, a detection mechanism and a driving mechanism, the detection mechanism comprises a light source module, a first imaging system, a second imaging system, a third i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TONG CHANGQING, WANG DONG, WANG JINYA, XU CHENGYI, LIU QINGQIN, CHEN HAORAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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