Detection device suitable for detecting micro-mirror array
The invention discloses a detection device suitable for detecting a micro-mirror array. The detection device comprises an upper computer, a detection mechanism and a driving mechanism, the detection mechanism comprises a light source module, a first imaging system, a second imaging system, a third i...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a detection device suitable for detecting a micro-mirror array. The detection device comprises an upper computer, a detection mechanism and a driving mechanism, the detection mechanism comprises a light source module, a first imaging system, a second imaging system, a third imaging system, an image sensor and a position sensor; the first imaging system is used for imaging an emergent light beam of the light source module onto the micro-reflector array; the second imaging system is used for imaging a reflected light beam of the micro-reflector array to the image sensor; the third imaging system is used for imaging reflection angle spectrums of the micro-reflectors in the micro-reflector array to the position sensor; the upper computer displays image information fed back by the image sensor in real time so as to observe the detection process of the micro-reflector array in real time, and the upper computer processes light spot position information fed back by the position sensor so as to |
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