Detection device suitable for detecting micro-mirror array

The invention discloses a detection device suitable for detecting a micro-mirror array. The detection device comprises an upper computer, a detection mechanism and a driving mechanism, the detection mechanism comprises a light source module, a first imaging system, a second imaging system, a third i...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TONG CHANGQING, WANG DONG, WANG JINYA, XU CHENGYI, LIU QINGQIN, CHEN HAORAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention discloses a detection device suitable for detecting a micro-mirror array. The detection device comprises an upper computer, a detection mechanism and a driving mechanism, the detection mechanism comprises a light source module, a first imaging system, a second imaging system, a third imaging system, an image sensor and a position sensor; the first imaging system is used for imaging an emergent light beam of the light source module onto the micro-reflector array; the second imaging system is used for imaging a reflected light beam of the micro-reflector array to the image sensor; the third imaging system is used for imaging reflection angle spectrums of the micro-reflectors in the micro-reflector array to the position sensor; the upper computer displays image information fed back by the image sensor in real time so as to observe the detection process of the micro-reflector array in real time, and the upper computer processes light spot position information fed back by the position sensor so as to