Magnetic fluid shaft

The invention discloses a magnetic fluid shaft which comprises an inner shaft and an outer shaft, the inner shaft is sleeved with the outer shaft, a plurality of bearings arranged at intervals in the axial direction are arranged between the outer shaft and the inner shaft, the space between at least...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU PENGFEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, GUO SONG, SANG KANG, HU DONGDONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a magnetic fluid shaft which comprises an inner shaft and an outer shaft, the inner shaft is sleeved with the outer shaft, a plurality of bearings arranged at intervals in the axial direction are arranged between the outer shaft and the inner shaft, the space between at least two adjacent bearings is filled with magnetic fluid, and at least one of the outer shaft and the inner shaft is provided with a cooling channel. And a cooling medium is introduced. By adopting the scheme, when cooling is needed, a cooling medium can be introduced into the cooling channel to reduce the temperature of the magnetofluid shaft, so that the use performance and the service life of the magnetofluid shaft in a high-temperature environment can be ensured, the magnetofluid shaft can be used in two different processes of ion beam etching and ion beam deposition, and the cost of the magnetofluid shaft is reduced. And the applicability of the magnetofluid shaft can be greatly improved. 本发明公开一种磁流体轴,包括内轴和外轴,所述外轴外