Coarse grinding fluid for processing silicon carbide wafer and preparation method thereof

The invention relates to coarse grinding liquid for processing a silicon carbide wafer and a preparation method of the coarse grinding liquid. The coarse grinding liquid comprises a solution A and a solution B, the solution A comprises the following raw materials in percentage by mass: 5-15% of alum...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUI HONGYE, YAO LIJUN, WAN XUJUN, ZHU HAIQING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ADHESIVES CHEMISTRY DYES METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS POLISHES POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SKI WAXES
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