Laser thermal frequency stabilization device for single-frequency laser interferometer

The invention discloses a laser thermal frequency stabilization device for a single-frequency laser interferometer, solves the problem that the stability of an existing laser thermal frequency stabilization device is affected by environmental interference easily, and belongs to the technical field o...

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Bibliographische Detailangaben
Hauptverfasser: GUO XINRU, GAI JIANXIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a laser thermal frequency stabilization device for a single-frequency laser interferometer, solves the problem that the stability of an existing laser thermal frequency stabilization device is affected by environmental interference easily, and belongs to the technical field of displacement measurement with nanoscale precision. The system comprises a temperature acquisition module which is used for detecting the temperature of a resonant cavity body of the He-Ne laser generator and inputting the temperature to a processor; laser emitted by the He-Ne laser generator is divided into two beams of linearly polarized light through the light splitting module, and the two beams of linearly polarized light are converted into current signals to be input into the photoelectric conversion module; the photoelectric conversion module converts an input current signal into two paths of voltage signals, a differential signal of the two paths of voltage signals is converted into a single-end voltage sig