Method for storing and taking photomask box through semiconductor intelligent warehouse
The invention provides a method for storing and taking photomask boxes of an intelligent semiconductor warehouse, and the intelligent warehouse comprises a warehouse body which is used for storing the photomask boxes for storing semiconductor wafers; a photomask box transferring and circulating devi...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention provides a method for storing and taking photomask boxes of an intelligent semiconductor warehouse, and the intelligent warehouse comprises a warehouse body which is used for storing the photomask boxes for storing semiconductor wafers; a photomask box transferring and circulating device is arranged on one side of the storage body and is used for circularly transferring photomask boxes; a photomask box transverse transfer mechanism is arranged at one end in the storage body; a photomask box taking device is arranged in the storage body and used for feeding the photomask boxes transferred to the photomask box transverse transfer mechanism into the storage body; and the photomask box taking device is used for feeding the photomask boxes into a photomask box bracket for storing the photomask boxes of the storage body. According to the intelligent warehouse, the function of circularly storing the photomask boxes outside the warehouse body can be achieved, repeated manual carrying of the photomask bo |
---|