Semiconductor device

A semiconductor device disclosed by the present invention comprises a spraying device and a plurality of working cavities, the spraying device comprises a liquid supply pipeline, a supercharging device and a pressure control device, the liquid supply pipeline comprises a main pipeline and a pluralit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIA ZHAOWEI, WANG JIAN, LU CHENHUA, YANG HONGCHAO, WANG HUI, DIAO JIANHUA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor device disclosed by the present invention comprises a spraying device and a plurality of working cavities, the spraying device comprises a liquid supply pipeline, a supercharging device and a pressure control device, the liquid supply pipeline comprises a main pipeline and a plurality of branch pipelines, and the plurality of branch pipelines comprise a first pipeline and a second pipeline. The main pipeline is connected with the first end of the first pipeline and the first end of the second pipeline; the pressurizing device is arranged on the main pipeline, the pressurizing device pressurizes the spraying liquid introduced into the main pipeline according to a first preset pressure value, the pressurized spraying liquid enters the first pipeline and the second pipeline, and the spraying liquid at the second end of the first pipeline has the first preset pressure value; the pressure control device adjusts the pressure of the spraying liquid in the second pipeline according to the second prese