Acetylene fluid supply package, system including same, and method of manufacturing semiconductor device using same

Compositions comprising an acetylene fluid at least partially dissolved in a modified solvent are described. The improved solvents exhibit non-toxicity and are further characterized by low vapor pressure to minimize solvent carrying during acetylene fluid delivery while maintaining suitable acetylene solubilizing capacity. 本发明描述了包含至少部分地溶解在改进的溶剂中的乙炔流体的组合物。改进的溶剂表现出非毒性并且进一步的特征在于低蒸气压，以最小化在乙炔流体递送期间的溶剂携带，同时保持合适的乙炔增溶能力。