Evaporation source

According to one embodiment of the present invention, an evaporation source comprises: a crucible unit which has an internal space filled with an organic substance, and in which a discharge port through which vapor deposition particles formed by heating and evaporating the organic substance are disc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KO GYOUNG O, KIM SEONG-MOON, LEE TAEKGI, CHI DAE-JUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:According to one embodiment of the present invention, an evaporation source comprises: a crucible unit which has an internal space filled with an organic substance, and in which a discharge port through which vapor deposition particles formed by heating and evaporating the organic substance are discharged is formed so as to penetrate the upper surface in the vertical direction; and a cover unit which is disposed at the lower part of the substrate, has an ejection space which communicates with the internal space and ejects the vapor deposition particles in the internal space, and has an ejection port which is formed so as to pass through the upper surface in the vertical direction so as to eject the vapor deposition particles toward the substrate. The cover unit has a passage that communicates with the outside and allows the vapor deposition particles to be discharged. 依据本发明的一个实施例,蒸发源包括:坩锅单元,具有充填了有机物质的内部空间,在上面以上下方向贯穿的方式形成有喷出口,所述有机物质被加热蒸发而形成的蒸镀粒子通过所述喷出口喷出;及,罩子单元,配置在基板的下部,具有连通所述内部空间而让所述内部空间的蒸镀粒子喷出的喷出空间,在上面以上下方向贯