Vertical stacking waveguide optical detector for 1550nm optical communication wave band

The invention provides a 1550nm optical communication waveband vertical stacking waveguide optical detector, which adopts a CMOS (Complementary Metal Oxide Semiconductor) process, uses SOI (Silicon On Insulator) to manufacture a silicon waveguide, sputter a layer of Au nanoparticles at the position...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIA YIDING, WANG BING, HUANG GUOYI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING
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