Vertical stacking waveguide optical detector for 1550nm optical communication wave band

The invention provides a 1550nm optical communication waveband vertical stacking waveguide optical detector, which adopts a CMOS (Complementary Metal Oxide Semiconductor) process, uses SOI (Silicon On Insulator) to manufacture a silicon waveguide, sputter a layer of Au nanoparticles at the position of the silicon waveguide, covers the position of the silicon waveguide and the left side area of the silicon waveguide with two-dimensional black phosphorus, prepares SnSe on the two-dimensional black phosphorus to cover the position of the silicon waveguide, and covers the SnSe and the right side area of the SnSe with the two-dimensional black phosphorus. Two Ti/Au electrodes located on the two sides of the silicon waveguide are prepared, corresponding two-dimensional black phosphorus is covered, a layer of SiO2 thin film is deposited to cover all the two-dimensional black phosphorus below until the electrode positions are reached, graphene is placed on the SiO2 thin film, and a Ti/Au electrode is prepared on the