Method for mfg. gratings on the surface of ultraviolet adsorption material, and the products thereof
The interference streak of quasi-molicular laser pulse is utilized for acting directly on the surface of ultravioles absorb material on witch surface is etched in periodical structure, so the grate is produced. It is showed by atomic force microscope that grate obtd. with above method has ripple-sha...
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| Sprache: | eng |
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| Zusammenfassung: | The interference streak of quasi-molicular laser pulse is utilized for acting directly on the surface of ultravioles absorb material on witch surface is etched in periodical structure, so the grate is produced. It is showed by atomic force microscope that grate obtd. with above method has ripple-shaped surface, perfect periodicity, uniform etching depth and smooth etched trough. This method is useful and convenient to commercialize the prodn. of grating filter, grating coupler, grating lens and distributior feedback Bragg grate. |
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