Composite structure, method for evaluating same, semiconductor, and display screen manufacturing device

Provided are: a ceramic coating layer having excellent particle resistance; and a method for evaluating the particle resistance of the ceramic coating layer. Specifically, the composite structure includes a base material and a structure provided on the base material and having a surface, the structu...

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Bibliographische Detailangaben
Hauptverfasser:	TAKIZAWA RYOTO, WADA TAKUMA, SERIZAWA HIROAKI, KINJO ATSUSHI, IWASAWA JUNICHI, AOSHIMA TOSHIHIRO, TAKAHASHI YUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIME, MAGNESIA MEASURING METALLURGY PHYSICS REFRACTORIES SEMICONDUCTOR DEVICES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	Provided are: a ceramic coating layer having excellent particle resistance; and a method for evaluating the particle resistance of the ceramic coating layer. Specifically, the composite structure includes a base material and a structure provided on the base material and having a surface, the structure includes a polycrystalline ceramic, and the brightness Sa calculated by TEM image analysis satisfies a predetermined value. The present invention can be suitably used as an internal member of a semiconductor manufacturing device that requires particle resistance. 本发明提供一种抗粒子性出色的陶瓷涂层以及评价陶瓷涂层的抗粒子性的方法。具体而言，是一种包含基体材料及设置在所述基体材料上且具有表面的结构物的复合结构物，结构物包含多结晶陶瓷，将通过TEM图像解析算出的亮度Sa满足规定值的复合结构物，可作为要求具有抗粒子性的半导体制造装置的内部构件而适当加以使用。