Furnace tube equipment and cleaning assembly and method thereof

The invention relates to furnace tube equipment and a cleaning assembly and method thereof. The cleaning assembly of the furnace tube equipment comprises a cleaning pipeline, a first pressure adjusting structure and a controller. The cleaning pipeline is used for being communicated with a reaction chamber of the furnace tube equipment so as to introduce cleaning gas into the reaction chamber. And the first pressure adjusting structure is connected with the cleaning pipeline and is used for adjusting the pressure of gas introduced into the reaction chamber by the cleaning pipeline. The controller is electrically connected with the first pressure adjusting structure and used for controlling the first pressure adjusting structure to alternately reciprocate according to the first preset air pressure and the second preset air pressure, and the first preset air pressure is larger than the second preset air pressure. In this way, when the first pressure adjusting structure alternately reciprocates according to the f