Liquid supply unit and liquid supply method

The invention provides a liquid supply unit and a liquid supply method. The liquid supply unit includes: a nozzle; a liquid supply pipe for supplying the processing liquid to the nozzle; an impurity removal unit installed in the liquid supply pipe to remove impurities in the processing liquid, in wh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GOH JUNGSUK, JEONG WAN-HEE, LIM DO-YEON, JIN JUSHENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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