Graphite crucible with silicon carbide coating for third-generation semiconductor
The invention discloses a graphite crucible with a silicon carbide coating for a third-generation semiconductor, and belongs to the technical field of graphite crucibles, the graphite crucible comprises a fixed bottom plate, a mounting ring is fixedly arranged on the fixed bottom plate, two symmetri...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a graphite crucible with a silicon carbide coating for a third-generation semiconductor, and belongs to the technical field of graphite crucibles, the graphite crucible comprises a fixed bottom plate, a mounting ring is fixedly arranged on the fixed bottom plate, two symmetrically arranged supports are fixedly arranged on the mounting ring, and supporting tables are fixedly arranged on the two supports; rotating shafts are rotationally arranged on the two supporting tables, a carrying plate is fixedly arranged on one of the supports, when a motor is started to drive a shaft body to rotate, a swing rod on a swing device can swing materials in the crucible inner shell to be flatly placed, and when the materials and the crucible inner shell are stuck, the swing rod cannot push the materials to operate; when the torsion of the torsion spring is continuously increased to a certain degree, the swing rod compresses and extrudes the spring to pull out the limiting rod from the interior of the |
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