Surface acoustic wave device structure and transverse clutter mode suppression method thereof

The invention discloses a surface acoustic wave device structure and a transverse clutter mode suppression method thereof, the structure comprises a busbar, false fingers, gaps and a finger strip assembly, the finger strip assembly comprises a plurality of finger strips which are uniformly arranged...

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Bibliographische Detailangaben
Hauptverfasser: ZHAN XUEKUI, PAN HONGZHI, MA JINYI, MI JIA, DU XUESONG, HE YI, LENG JUNLIN, DONG JIAHE, CHEN ZHENGLIN, XIAO QIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a surface acoustic wave device structure and a transverse clutter mode suppression method thereof, the structure comprises a busbar, false fingers, gaps and a finger strip assembly, the finger strip assembly comprises a plurality of finger strips which are uniformly arranged along the axial direction, and the finger strips are integrally of a stepped structure with a plurality of steps along the vertical direction. According to the scheme, by optimizing the busbar, the false finger, the gap and the stepped finger strip structure, clutter mode parasitism of all orders is restrained, and meanwhile a high-Q-value (quality factor) sound wave mode can be excited. Therefore, the performance of low loss, high pass band flatness and the like of the surface acoustic wave device can be realized, the requirements of a high-speed mobile communication terminal and the like on a high-performance surface acoustic wave device are met, and the preparation process used by the structure is easy to realiz