Active-disturbance-rejection motion control method of photoetching machine workpiece table and related device

The invention discloses an active-disturbance-rejection motion control method for a photoetching machine workpiece table, and relates to the technical field of photoetching machines, and the method comprises the steps: carrying out the iterative processing of the actual displacement error of the photoetching machine workpiece table through a feed-forward link, and obtaining a feed-forward output; the actual displacement and the expected displacement of the photoetching machine workpiece table are processed through a feedback link, and feedback output is obtained; the feedback link adopts an active disturbance rejection control strategy; according to the feedforward output and the feedback output, determining an expected acceleration of the photoetching machine workpiece table; and controlling the photoetching machine workpiece table to move according to the expected acceleration and the actual acceleration of the photoetching machine workpiece table. According to the method, high-precision control on the work