Probe card, probe card test system and probe card test method

The invention discloses a probe card, a probe card testing system and a probe card testing method. The probe card comprises a probe card body, a first measuring pin, a second measuring pin, a third measuring pin and a measuring resistor. Wherein the first measuring pin is arranged on the probe card...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAO YINSHUANG, JIAO LANQING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a probe card, a probe card testing system and a probe card testing method. The probe card comprises a probe card body, a first measuring pin, a second measuring pin, a third measuring pin and a measuring resistor. Wherein the first measuring pin is arranged on the probe card main body and is used for transmitting current into a resistor to be measured when the first measuring pin is connected with one end of the resistor to be measured; the second measuring pin is arranged on the probe card main body, is grounded and is used for forming an access with the resistor to be measured and the first measuring pin when the second measuring pin is connected with the other end of the resistor to be measured; and the third measuring pin and the fourth measuring pin are arranged on the probe card and are used for measuring the terminal voltage of the resistor to be measured when the third measuring pin and the fourth measuring pin are correspondingly connected with the two ends of the resistor to