Defect detection device

The invention provides a defect detection device capable of easily comparing positions among a plurality of images used for detecting defects. A defect detection device (10) is provided with: an excitation unit (12) for imparting vibration to an object to be inspected; a vibration state display imag...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGIMOTO MASARU, HORIKAWA KOJI, MISHINA NAOTO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a defect detection device capable of easily comparing positions among a plurality of images used for detecting defects. A defect detection device (10) is provided with: an excitation unit (12) for imparting vibration to an object to be inspected; a vibration state display image creation unit (163) that measures, using an optical member, the vibration state in a measurement region on the surface of the object to be inspected to which the vibration has been imparted, and creates one or more vibration state display images indicating the vibration state in the measurement region on the basis of the measurement result; an optical image acquisition unit (164) that acquires an optical image within the measurement region; an image display unit (19) that displays an image; and a display control unit (166) that performs control for simultaneously displaying two of the one or more vibration state display images and the optical image on the image display unit with respect to the same display region