Natural circulation vertical silicon tetrachloride vaporization system

The invention discloses a natural circulation vertical silicon tetrachloride vaporization system, and belongs to the technical field of polycrystalline silicon production. The system comprises a silicon tetrachloride vaporizer and a silicon tetrachloride gas-liquid separation tank, the bottom of the...

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Bibliographische Detailangaben
Hauptverfasser: WANG LINA, LI MENG, SHOU WENJIA, ZHANG LEI, SHI CHUANG, HE HUIMIN, WANG YAJIE, WU YANPING, JIANG YI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a natural circulation vertical silicon tetrachloride vaporization system, and belongs to the technical field of polycrystalline silicon production. The system comprises a silicon tetrachloride vaporizer and a silicon tetrachloride gas-liquid separation tank, the bottom of the silicon tetrachloride vaporizer is connected with a hydrogen feeding pipeline, and the top of the silicon tetrachloride vaporizer is connected with the middle of the silicon tetrachloride gas-liquid separation tank through a silicon tetrachloride vaporizer outlet pipeline; the output end at the bottom of the silicon tetrachloride gas-liquid separation tank is connected with the bottom of the silicon tetrachloride vaporizer; and the upper part of the silicon tetrachloride gas-liquid separation tank is also connected with a liquid-phase silicon tetrachloride pipeline. Aiming at the defects of high vaporization temperature of silicon tetrachloride and serious vibration of a kettle type heat exchanger in a cold hydrog