Methods, systems, and apparatus for performing calibration operations of multiple mass flow controllers (mfcs) of substrate processing system

Aspects generally relate to methods, systems, and apparatus for performing calibration operations of multiple mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow profile is created for a series of target flow rates across a plurality of setpoints. In one embodiment, a method of performing a calibration operation of a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operating time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a ranking list according to the operating time for each MFC. The method includes performing the calibration operation on the plurality of MFCs according to the ranked list and during an idle time of the substrate processing system. 各方面一般涉及用于进行基板处理系统的多个质量流量控制器(MFC)的校准操作的方法、系统及设备。在一个方面中，为跨多个设定点的一系列目标流动速率创建经校正的流量曲线。在一个实施方式中，一种进行基板处理系统的多个质量流量控制器(MFC)的校准操作的方法包括为该校准操作优先化该多个MFC。该优先化包括