Temperature control device and method and semiconductor process equipment

The invention provides a temperature control device and method and semiconductor process equipment, in the device, a first supply unit is used for providing a fluid with a first temperature; the second supply unit is used for providing fluid at a second temperature; the liquid pump is connected with the output end of the fluid channel; the fluid control unit is used for conveying the fluid provided by the first supply unit, and/or the fluid provided by the second supply unit, and/or the fluid output by the liquid pump to the fluid channel, detecting a first temperature value of the fluid output by the fluid control unit to the input end of the fluid channel in real time, and controlling the temperature of the fluid according to the first temperature value and a preset target temperature value. And the flow proportion of the first supply unit and/or the second supply unit and/or the liquid pump conveyed to the fluid channel is adjusted in real time, so that the first temperature value is equal to the target te