Wear-resistant nano gradient composite coating and magnetron sputtering method thereof

The invention discloses a wear-resistant nano gradient composite coating and a magnetron sputtering method thereof, and belongs to the technical field of material surface treatment. The wear-resistant nano gradient composite coating is composed of oxide nanoparticles and a soft layer, the oxide nano...

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Bibliographische Detailangaben
Hauptverfasser:	LIANG YILONG, TANG QING, LIANG YU, YANG SONGYUN, WU YUZHONG, YANG MING, CHEN BAOLAI, SHANG XICHANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METALLURGY NANOTECHNOLOGY PERFORMING OPERATIONS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention discloses a wear-resistant nano gradient composite coating and a magnetron sputtering method thereof, and belongs to the technical field of material surface treatment. The wear-resistant nano gradient composite coating is composed of oxide nanoparticles and a soft layer, the oxide nanoparticles are coated with the soft layer in the friction process, the oxide nanoparticles are gradually reduced from the surface of the coating to the center part, the soft layer is gradually increased from the surface of the coating to the center part, and a reverse composite gradient layer is formed. A soft layer and an oxide nano-particle layer are obtained through a magnetron sputtering method, the soft layer is composed of Ag and Cu soft metal, oxide nano-particles are Fe2O3 nano-particles, the oxide nano-particles have a bearing effect, fretting wear of the material is reduced through rolling, and the soft metal has coating and bonding effects on the oxide nano-particles. According to the wear-resistant nano