Semiconductor sensor and VOCs monitoring device
The invention relates to a semiconductor sensor and a VOCs monitoring device, a base material of the semiconductor sensor has a certain axial length, two electrodes are arranged on the base material at an interval, a semiconductor coating layer is arranged on the base material and forms an adsorptio...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a semiconductor sensor and a VOCs monitoring device, a base material of the semiconductor sensor has a certain axial length, two electrodes are arranged on the base material at an interval, a semiconductor coating layer is arranged on the base material and forms an adsorption surface, an electric heating element is positioned on the base material, the electric heating element is used for heating the semiconductor coating layer, and the adsorption surface is formed on the semiconductor coating layer. The conductivity of the semiconductor coating layer is improved, so that oxygen in the atmosphere is adsorbed on the adsorption surface of the semiconductor coating layer in the form of O or O < 2->; and the resistance value of the semiconductor coating layer is changed along with the change of the amount of oxygen adsorbed on the adsorption surface according to a direct proportion relationship. The semiconductor sensor is applied to the VOCs monitoring device, is good in humidity resistan |
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