Mounting apparatus, inspection apparatus, and method of manufacturing semiconductor device

The invention provides a mounting apparatus, an inspection apparatus, and a method of manufacturing a semiconductor device capable of improving inspection stability. The mounting device is provided with: an imaging device provided above a plurality of inspection objects; and a control device configured so as to inspect the plurality of objects to be inspected on the basis of an image obtained by imaging the plurality of objects to be inspected in the same exposure by the imaging device. The control device is configured to arrange a reference object at the center of the field of view of the imaging device and image the reference object to acquire first image data, and acquire first data related to the reference object based on the first image data. A reference object is disposed at a position away from the center of the field of view by a predetermined distance, the reference object is imaged to acquire second image data, second data relating to the reference object is acquired on the basis of the second image