Fine positioning apparatus with atomic resolution

A fine positioning apparatus is provided which comprises inductive actuators. A positioning accuracy of well below 1 nm is achieved compared to 1 micrometer provided by known inductive actuators. In preferred embodiments, the motion of the magnetic actuator is dampened or decreased by machanical mea...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	H. ROHRER, W. HAEBERLE, G. K. BINNIG
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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