Fine positioning apparatus with atomic resolution
A fine positioning apparatus is provided which comprises inductive actuators. A positioning accuracy of well below 1 nm is achieved compared to 1 micrometer provided by known inductive actuators. In preferred embodiments, the motion of the magnetic actuator is dampened or decreased by machanical mea...
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| Sprache: | eng |
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| Zusammenfassung: | A fine positioning apparatus is provided which comprises inductive actuators. A positioning accuracy of well below 1 nm is achieved compared to 1 micrometer provided by known inductive actuators. In preferred embodiments, the motion of the magnetic actuator is dampened or decreased by machanical means, thus increasing the amount of current necessary to move the actuator. The fine positioner can be used in the field of scanning probe microscopy. |
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