Micro-nano element for realizing dynamic light field regulation and preparation method thereof

The invention relates to the technical field of micro-nano elements and light field regulation and control, in particular to a micro-nano element for realizing dynamic light field regulation and control and a preparation method of the micro-nano element. The preparation method comprises the followin...

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Bibliographische Detailangaben
Hauptverfasser:	ZHAO XINYU, LUO JIYING, SUN ZEHUA, LIU WEIGUO, LI HAOYU, LI JUNYAN, SHEN LUJUN, WANG SHUYI, GE SHAOBO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to the technical field of micro-nano elements and light field regulation and control, in particular to a micro-nano element for realizing dynamic light field regulation and control and a preparation method of the micro-nano element. The preparation method comprises the following steps: preparing a female template and a transfer printing template; processing a layer of transparent electrode on the quartz glass substrate to prepare two electrode plates; processing a PMN-PT film on the transparent electrode layer of the prepared electrode plate; the PMN-PT film layer is processed into a functional micro-nano structure; the other electrode plate covers the functional micro-nano structure, and the quartz glass substrate is located on the outer side; the two layers of transparent electrodes are respectively a bottom electrode and a top electrode, and a wire is connected between the bottom electrode and the top electrode to obtain the dynamic light field regulation micro-nano element. The steps