Auxiliary cathode device for glow discharge coating and coating equipment

The invention discloses an auxiliary cathode device for glow discharge coating and coating equipment. The auxiliary cathode device comprises a plurality of auxiliary cathodes, the auxiliary cathodes are arranged on a coating rotating frame serving as cathodes in the circumferential direction, a plur...

Ausführliche Beschreibung

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Hauptverfasser: CAI ZHENZHOU, CAO XIANGYIN, HAO SHENGXI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an auxiliary cathode device for glow discharge coating and coating equipment. The auxiliary cathode device comprises a plurality of auxiliary cathodes, the auxiliary cathodes are arranged on a coating rotating frame serving as cathodes in the circumferential direction, a plurality of hanging rods are arranged on the coating rotating frame in the circumferential direction, the auxiliary cathodes are located on the inner sides of the hanging rods, and the arrangement height of the auxiliary cathodes corresponds to the arrangement height of the hanging rods on the coating rotating frame. And the distance between the auxiliary cathode and the hanging rod is adjusted, so that the electric field distribution in the height direction during glow discharge coating is adjusted. According to the invention, the uniformity of the film thickness of the film coating pieces loaded at different height positions on the hanging rod can be controlled, and the film layer uniformity, the film layer quality