Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor
The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve,...
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| creator | LYU ZUNHUA JI BIN FENG YUCHI |
| description | The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve, the scraping plates are horizontally arranged on the hollow sleeve in a penetrating manner and can freely slide on the hollow sleeve; the driving part is used for driving the plurality of scrapers to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards; and the rotating part is used for driving the scraping plate to axially rotate around the supporting column when the hollow sleeve moves upwards. When the boat body is placed in the tubular PECVD equipment, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scrapers to rotate around the axial direction of the supporting column, so that |
| format | Patent |
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When the boat body is placed in the tubular PECVD equipment, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scrapers to rotate around the axial direction of the supporting column, so that</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; CLEANING ; CLEANING IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230912&DB=EPODOC&CC=CN&NR=116732501A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230912&DB=EPODOC&CC=CN&NR=116732501A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LYU ZUNHUA</creatorcontrib><creatorcontrib>JI BIN</creatorcontrib><creatorcontrib>FENG YUCHI</creatorcontrib><title>Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor</title><description>The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve, the scraping plates are horizontally arranged on the hollow sleeve in a penetrating manner and can freely slide on the hollow sleeve; the driving part is used for driving the plurality of scrapers to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards; and the rotating part is used for driving the scraping plate to axially rotate around the supporting column when the hollow sleeve moves upwards. When the boat body is placed in the tubular PECVD equipment, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scrapers to rotate around the axial direction of the supporting column, so that</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyzEKwkAQheE0FqLeYT1AwDWotQTFykZLIaybyWZAd4aZyf1NQHub9zffmxeP28BMYpiTe1Iw1xFNIw6V1IJhdCygOoEkgXs0-Elx1qO0ZYIMMlLKTuGNkXI7RCNZFrMuvBRW3y6K9fl0ry8lMDWgHOJ4tKa-er8_VNvdxh-rf8wHMGA8yQ</recordid><startdate>20230912</startdate><enddate>20230912</enddate><creator>LYU ZUNHUA</creator><creator>JI BIN</creator><creator>FENG YUCHI</creator><scope>EVB</scope></search><sort><creationdate>20230912</creationdate><title>Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor</title><author>LYU ZUNHUA ; JI BIN ; FENG YUCHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN116732501A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>LYU ZUNHUA</creatorcontrib><creatorcontrib>JI BIN</creatorcontrib><creatorcontrib>FENG YUCHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LYU ZUNHUA</au><au>JI BIN</au><au>FENG YUCHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor</title><date>2023-09-12</date><risdate>2023</risdate><abstract>The invention discloses a supporting boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, a boat foot, an electrode block, a supporting column, a floating sleeve and a hollow sleeve, the scraping plates are horizontally arranged on the hollow sleeve in a penetrating manner and can freely slide on the hollow sleeve; the driving part is used for driving the plurality of scrapers to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards; and the rotating part is used for driving the scraping plate to axially rotate around the supporting column when the hollow sleeve moves upwards. When the boat body is placed in the tubular PECVD equipment, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scrapers to rotate around the axial direction of the supporting column, so that</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING |
| title | Supporting boat foot for isostatic pressing graphite boat for third-generation semiconductor |
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